Standard XY胃-axis Direct Drive Motion Micro-alignment Stage (XY胃 Series)
Category: PRECISION POSITIONING STAGE
Specifications
XY胃-axis Direct Drive Motion Standard Model Micro-alignment Stage Supplier in Johor
XY胃-axis Direct Drive Motion Standard Model Micro-alignment Stage Supplier in Kuala Lumpur
XY胃-axis Direct Drive Motion Standard Model Micro-alignment Stage Supplier in Melaka
XY胃-axis Direct Drive Motion Standard Model Micro-alignment Stage Supplier in Penang
XY胃-axis Direct Drive Motion Standard Model Micro-alignment Stage Supplier Malaysia
Details
Model :
- XYθ80
- XYθ100
- XYθ120
- XYθ170
Features :
- Equipped with a high-resolution encoder for fully closed-loop control
- Utilizes direct-drive linear (DDL) and direct-drive rotary (DDR) powertrains
- Simpler structure, higher positioning accuracy, and shorter alignment time
Diagram :
Dimension :
- XYθ80
- XYθ100
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- XYθ120
- XYθ170
Specifications :
- XYθ80
| Model | ΧΥΘ80 | ||
| Moving direction | X-axis | Y axis | Ɵ axis |
| Journey (mm) | ±10 | 360° | |
| Load (kgf) | < 0.5 + Ɵ | < 0.5 + Ɵ + X | <0.5 |
| Positioning accuracy (um) | ±5 | ±200arc/sec | |
| Duplicate targeting Accuracy (um) | ±2.5 | ±5arc /sec | |
| Horizontal straightness (um) | ≤10 | / | |
| Vertical straightness (um) | ≤10 | / | |
| Material | Aluminum alloy | ||
| Resolution | 1 | 23bit | |
| Origin reference | External origin | / | |
| External signal | Origin, positive limit, negative limit | / | |
- XYθ100
| Model | ΧΥΘ100 | ||
| Moving direction | X-axis | Y axis | Ɵ axis |
| Journey (mm) | ±10 | 360° | |
| Load (kgf) | <2 + Ɵ | < 2 + Ɵ + X | <2 |
| Positioning accuracy (um) | / | ±50arc/sec | |
| Duplicate targeting Accuracy (um) | ±2.5 | ±5arc /sec | |
| Horizontal straightness (um) | ≤10 | / | |
| Vertical straightness (um) | ≤10 | / | |
| Material | Aluminum alloy | ||
| Resolution | 1 | 23bit | |
| Origin reference | External origin | / | |
| External signal | Origin, positive limit, negative limit | / | |
- XYθ120
| Model | ΧΥΘ120 | ||
| Moving direction | X-axis | Y axis | Ɵ axis |
| Journey (mm) | ±10 | 360° | |
| Load (kgf) | <2 + Ɵ | < 2 + Ɵ + X | <2 |
| Positioning accuracy (um) | ±1.5 | ±150arc/sec | |
| Duplicate targeting Accuracy (um) | ±1 | ±5arc /sec | |
| Horizontal straightness (um) | ≤10 | / | |
| vertical straightness (um) | ≤10 | / | |
| Material | 45# | ||
| resolution | 1 | 23bit | |
| origin reference | external origin | / | |
| external signal | Origin, positive limit, negative limit | / | |
- XYθ170
| Model | ΧΥΘ170 | ||
| Moving direction | X-axis | Y axis | Ɵ axis |
| Journey (mm) | ±10 | 360° | |
| Load (kgf) | < 12 + Ɵ | < 12 + Ɵ + X | <12 |
| Positioning accuracy (um) | ±5 | ±150arc/sec | |
| Duplicate targeting Accuracy (um) | ±2.5 | ±5arc /sec | |
| Horizontal straightness (um) | ≤10 | / | |
| vertical straightness (um) | ≤10 | / | |
| Material | Aluminum alloy | ||
| resolution | 1 | 23bit | |
| origin reference | external origin | / | |
| external signal | Origin, positive limit, negative limit | / | |
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