Details

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Dimension :




 

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Specifications :
 

Parameter	X-axis (beam axis)	Y axis (dual drive axis)	Z axis (vertical axis)
Load(Kg)	/	/	On demand
Stroke(mm)	Customized according to requirements (<2m)	Customized according to requirements (<4m)	Customized according to requirements (<0.3m)
Maximum speed (mm/s)	<1.5m/s	<1.5m/s	<0.3m/s
Maximum acceleration	<1.5G	<1.5G	<0.5G
Positioning accuracy (µm (after compensation))	<±2	<±2	<±5
Repeatability (µm)	<±1.5	<±1.5	<±3
Straightness(µm)	<±4/300mm	>±4/300mm	>±5
Orthogonality(µm)	<±5/300mm@Y	<±5/300mm@X	<±3/300mm
Material	Aluminum alloy/marble	Aluminum alloy/marble	Aluminum alloy
Grating resolution (µm)	0.1/0.5/1 optional	0.1/0.5/1 optional	0.1/0.5/1 optional

 

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