Details

---

Dimension :


 

---

Specifications :
 

Parameter	X axis (upper axis)	Y1 (lower axis)
Load(Kg)	On demand	/
Stroke(mm)	Customized according to needs	Customized according to needs
Maximum Speed(mm/s)	<1.5m/s	<1.5m/s
Maximum acceleration	<1G	<1G
Positioning accuracy (µm (after compensation))	<±1.5	<±1.5
Repeatability (µm)	<±1	<±1
Straightness(µm)	<±2/300mm	<±2/300mm
Orthogonality(µm)	<±3/300mm@Y	<±3/300mm@X
Material	Marble	Marble
Grating resolution (µm)	0.1/0.5/1 optional	0.1/0.5/1 optional

 

---