Details

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Dimension :



 

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Specifications :
 

Parameter	Y axis (lower axis)	X axis (upper axis)	Z axis	DD1 axis	DD2 axis
Load(Kg)	On demand	/	on demand	on demand	3-10kg(customized on demand)
Stroke(mm)	Customized according to requirements (<1.5m)	Customized according to requirements (<1.5m)	Customized according to requirements (<20mm)	±90°	360°
Maximum Speed(mm/s)	<1.5m/s	<1.5m/s	<0.15m/s	Customized according to needs	Customized according to needs
Maximum acceleration	<2G	<2G	<1G	Customized according to needs	Customized according to needs
Positioning accuracy (µm (after compensation))	<±2	<±2	<±2	±25arcsec	±25arcsec
Repeat positioning accuracy (μm)	<±1	<±1	<±1	±3arcsec	±3arcsec
Straightness(µm)	<±2/300mm	<±2/300mm	<±2/50mm	/	/
Orthogonality(µm)	<±3/300mm@Y	<±3/300mm@X	<±4/300mm	/	/
Material	Aluminum alloy/marble	Aluminum alloy/marble	Aluminum alloy	Steel (main body)	Steel (main body)
Grating resolution (µm)	0.1/0.5/1 optional	0.1/0.5/1 optional	/	0.1/0.5/1 optional	0.1/0.5/1 optional

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