Details

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Dimension :



 

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Specifications :
 

Parameter	X axis (upper axis)	Y axis (lower axis)
Load(Kg)	On demand	/
Stroke(mm)	Customized according to needs	Customized according to needs
Speed(mm/s)	<1.5m/s	<1.5m/s
acceleration	<1G	<1G
Positioning accuracy (µm (after compensation))	<±1.5	<±1.5
Repeat positioning accuracy (μm)	<±1	<±1
Straightness(µm)	<±2/300mm	<±2/300mm
Orthogonality(µm)	<±3/300mm@Y	<±3/300mm@X
Material	Marble	Marble
Grating resolution (µm)	0.1/0.5/1 optional	0.1/0.5/1 optional

 

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