Details
Highly maneuverable servo motors and control software for low vibration, smooth, and rapid handling.
It is mainly used in the semiconductor industry, such as the handling and turning of precision products such as silicon wafers, etc., and also used for the precision transportation and transfer of other processing elements.
Model :
- SEMWR-200Z300S
Dimensions :
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Specifications :
| Type | Single arm |
| Applicable specifications | -300mm |
| Rated load | 0.5KG |
| Degree of freedom | 3 |
| Fixing method | B0X5 (bottom fixed)/T0X5 (top fixed) |
| Range of motion - lifting axis Z | 300mm |
| Range of motion - revolving axis T | 340deg |
| Range of motion - stretching axis R | 400mm |
| Maximum speed - lifting axis Z | 400mm/s |
| Maximum speed - revolving axis T | 260deg/sec |
| Maximum speed - stretching axis R | 1700mm/s |
| Repeated accuracy | +0.1mm |
| Machine weight (excluding controller) | 48kg |
| Cleanliness | Class100 |
| Voltage requirements | Single phase 220V 50/60Hz |
| Vacuum requirements | Φ6x1，-50~-70kpa |
| I/O interface | 4-way configurable digital input and output, 8-way universal digital input and output (extended with 8-way input and output) |
| Ethernet | 1pc |
| USB | 2pcs |
| RS232/RS485 | 1pc |
| Communication protocol | Modbus-RTU/TCP, Socket |
View more about Wafer Robot Single Arm (SEMWR-200Z300S) on main site